Description

AMI-5700 Systems are automated macro inspection tools that capture a full wafer image in a single shot to enable 100% lot inspection with high throughput, processing 180 or more wafers per hour with an added third load port. Using AI-based image comparison against defect-free reference wafers, the system can detect particles as small as 5 micrometers, scratches and pattern-defocus conditions that are typically missed by conventional macro inspection tools.

Specifications

Category

Other Industrial Products

Location

Belmont, California, and Nikon Precision Europe GmbH, headquartered in Langen, Germany

Listed

3 weeks ago

Views

9