Description

This is a thermistor-type temperature-sensing component associated with a gate valve assembly on a plasma process chamber, used to monitor valve or chamber-wall temperature and feed that reading back to the tool process-control system. Monitoring the valve temperature helps ensure it operates within its designed thermal range and helps detect abnormal heating during plasma processing.

Specifications

Manufacturer

Applied Materials

Model

0140

Category

Pumps & Fluid Handling

Condition

Used

Location

United States

Listed

1 month ago

Views

16