Description

Ebara Capacitance Gauges combine a Pirani sensor with a diaphragm-type capacitive sensor to provide gas-composition-independent pressure readings from about 3.8x10^-5 Torr up to atmospheric pressure. They are used for accurate vacuum monitoring on semiconductor process and pumping equipment. Product Type: Test & Measurement / Metrology

Specifications

Category

Test & Measurement

Location

Sacramento, California, United States

Listed

3 weeks ago

Views

18