Description

Ebara Ionization Gauges are hot-ion gauges used for high- to ultra-high-vacuum measurement, forming part of Ebara's combined Pirani-Capacitance-Ion gauge lineup that extends measurement down to roughly 3.8x10^-10 Torr. They are used where semiconductor process equipment requires monitoring of very low chamber pressures. Product Type: Test & Measurement / Metrology

Specifications

Category

Test & Measurement

Location

Sacramento, California, United States

Listed

3 weeks ago

Views

18