Description

The EVG40NT is an automated optical measurement system that performs non-destructive top-to-bottom side alignment accuracy measurements (to within about 40nm, 3-sigma) as well as critical-dimension and box-in-box measurements on structured or bonded wafers. It supports processes such as nanoimprint lithography and wafer-to-wafer bonding, including closed-loop alignment control for fine-pitch through-silicon-via manufacturing.

Specifications

Category

Other Industrial Products

Location

7700 South River Parkway Tempe, AZ 85284

Listed

3 weeks ago

Views

10