Description

The HyperGauge In-plane Film Thickness Meter (C***) is a semiconductor metrology system that uses Hamamatsu's proprietary λ-Capture spectroscopic interference technology to measure film thickness across an entire wafer (up to 300mm) in about 5 seconds using a high-sensitivity camera instead of a scanning spectrometer. It performs simultaneous two-dimensional wafer thickness mapping on both bare and patterned wafers, simplifying measurement-point selection versus traditional point-sensor systems. Product Type: Test & Measurement / Metrology

Specifications

Category

Test & Measurement

Location

SHELTON, CT 06484314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan Access

Listed

3 weeks ago

Views

18