Description

KLA *** Helical Coupling Spare is a precision motion/mechanical component. Use: It supports or transmits controlled movement in a wafer stage, optical stage or other positioning axis. Machine / Process / Subsystem: KLA process-control systems use precision optics, stages, sensors and electronics for wafer inspection, metrology and defect/process monitoring. Key Features & Specifications: • Manufacturer: KLA-Tencor • Model / Part No.: *** • low-play/repeatable mechanical motion • used where accurate positioning and stable motion transfer are required

Specifications

Manufacturer

KLA-Tencor

Model

262-440056-00

Category

Parts & Accessories

Condition

New

Location

United States

Listed

1 month ago

Views

11