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Description

This is a precision mechanical coupling used to connect a drive motor or lead screw to a Schneeberger-based linear stage within a KLA-Tencor wafer inspection or metrology system, transmitting rotational motion while accommodating small misalignment between the coupled shafts. Couplings like this are used in a stage drivetrain to maintain accurate, low-backlash motion for wafer positioning during inspection.

Specifications

Manufacturer
KLA-Tencor
Model
262
Category
Other Industrial Products
Condition
New
Location
United States
Listed
1 month ago
Views
15

KLA 262 470936 00 Coupling Shneeberger 52XX 51XX Stage

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United States
A

and605763

Identity revealed after deal is confirmed

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