Description

This is a four-point probe head used in a KLA-Tencor sheet-resistance measurement system, bringing four spring-loaded contact pins into precise, controlled contact with a semiconductor wafer surface to measure the resistivity of a deposited or implanted thin film. The specified probe spacing and contact force are set to minimize sample damage while ensuring reliable, repeatable electrical contact during the measurement, and this probe head type is used on KLA/Prometrix resistivity measurement platforms.

Specifications

Manufacturer

KLA-Tencor

Model

50

Category

Test & Measurement

Condition

New

Location

United States

Listed

1 month ago

Views

19