Description

LAM 333 376F70 4420 Hsg Esc Pwr Supply is a wafer chuck/electrostatic-chuck related component. Use: It supports and positions the wafer during processing and, when applicable, contributes to electrostatic clamping and thermal/process interface control. Machine / Process / Subsystem: Lam Research wafer-fabrication platforms are used in plasma etch, deposition and related process modules where precise process control and repeatability are critical. Key Features & Specifications: • Manufacturer: Lam Research • Model / Part No.: 333 • wafer support and positioning • process-chamber hardware with tight mechanical/thermal requirements

Specifications

Manufacturer

Lam Research

Model

333

Category

Parts & Accessories

Condition

Used

Location

United States

Listed

1 month ago

Views

13