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Description

LAM *** Manifold 100MT Manometer C36816 Ss 6BK T W Ic is a vacuum/process pressure transducer. Use: It measures process or vacuum pressure and provides an electrical feedback *** to the tool controller. Machine / Process / Subsystem: Lam Research wafer-fabrication platforms are used in plasma etch, deposition and related process modules where precise process control and repeatability are critical. Key Features & Specifications: • Manufacturer: Lam Research • Model / Part No.: 853 • pressure measurement for closed-loop process control • used with vacuum chambers, gas delivery and throttle-valve control

Specifications

Manufacturer
Lam Research
Model
853
Category
Chemical & Gas Systems
Condition
Used
Location
United States
Listed
1 month ago
Views
14

LAM 853 031456 001 Manifold 100MT Manometer C36816 Ss 6BK T W Ic

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United States
A

and605763

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