Description

The NSR-S215D is a dry KrF lithography scanner built on Nikon's Streamlign platform, offering flexible high-throughput exposure for mature-node manufacturing while maintaining compatibility with existing Nikon KrF systems in a fab. It targets non-immersion critical layers where cost-effective, reliable production performance is required.

Specifications

Category

Other Industrial Products

Location

Belmont, California, and Nikon Precision Europe GmbH, headquartered in Langen, Germany

Listed

3 weeks ago

Views

9