Description

The NSR-S333F is Nikon's latest dry ArF scanner, offering resolution of 65nm or better with a 0.92 numerical aperture lens and throughput of at least 300 wafers per hour (96 shots), aimed at fine patterning across logic, DRAM, SRAM and high-resolution image sensor devices. It leverages the stage architecture of Nikon's ArF immersion platform, with orders accepted from October 2025 and initial deliveries expected in the second half of 2026.

Specifications

Category

Other Industrial Products

Location

Belmont, California, and Nikon Precision Europe GmbH, headquartered in Langen, Germany

Listed

3 weeks ago

Views

9