Description

Thermoelectric, Peltier-based process thermostat used to precisely control electrostatic chuck (ESC) temperature on semiconductor plasma etch tools. The line spans models such as the S 1200, S 2400, and 4400 with cooling capacities from about 1.2 kW to 4.4 kW and a control range of roughly -20 to 90 degC, holding temperature to about +/-0.1 degC to improve wafer-to-wafer uniformity while using substantially less energy than compressor-based systems.

Specifications

Category

Other Industrial Products

Location

1819 Underwood Boulevard, Delran, New Jersey 08075

Listed

3 weeks ago

Views

10