Description

VAT 88773-R1 650 Series Pendulum Gate Valve Motor Driver Board PCB 88 791 Spare is a vacuum/process valve assembly. Use: It isolates, opens/closes or throttles gas/vacuum conductance between tool sections. Machine / Process / Subsystem: VAT high-vacuum valves provide process-pressure control and vacuum isolation in semiconductor process and sub-fab systems. Key Features & Specifications: • Manufacturer: VAT • Model / Part No.: 88773-R1 • vacuum isolation or downstream pressure control • designed for repeated actuation in process or sub-fab gas paths

Specifications

Manufacturer

VAT

Model

88773-R1

Category

Parts & Accessories

Condition

Used

Location

Albuquerque, NM, USA

Listed

1 month ago

Views

14