Description
Brooks GF120X-109623 Mass Flow Controller MFC 50 SCCM C4F6 Lot of 2 New is a mass flow controller (MFC). Use: It meters and actively regulates process-gas flow to a commanded setpoint. Machine / Process / Subsystem: Brooks semiconductor automation uses clean, precise atmospheric and vacuum wafer-handling robotics, load ports and transport systems. Key Features & Specifications: • Manufacturer: Brooks Instrument • Model / Part No.: GF120X-109623 • thermal/flow sensing with closed-loop valve control • process-gas delivery for deposition, etch, implant, clean or other controlled-gas processes • Flow rating: 50 SCCM (from product identification)
Specifications
- Manufacturer
- Brooks Instrument
- Model
- GF120X-109623
- Category
- Chemical & Gas Systems
- Condition
- New
- Location
- Albuquerque, NM, USA
- Listed
- 1 month ago
- Views
- 17
Brooks GF120X-109623 Mass Flow Controller MFC 50 SCCM C4F6 Lot of 2 New
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