Description

The Litho Booster is a standalone alignment station that brings inline Alignment Station capabilities to other scanners in a fab, delivering shot-by-shot feed-forward corrections to compensate for etch, anneal and CVD/PVD process effects. It is compatible with a wide range of Nikon immersion, ArF, KrF and stepper platforms as well as non-Nikon scanners, and has demonstrated overlay improvements (e.g., from roughly 2.85/2.51nm to 1.85/1.63nm in x/y) through dense sampling and mark-asymmetry correction.

Specifications

Category

Other Industrial Products

Location

Belmont, California, and Nikon Precision Europe GmbH, headquartered in Langen, Germany

Listed

3 weeks ago

Views

11