Description

The OPTISTATION-3000 Series is Nikon's semiconductor inspection platform for after-develop and after-etch wafer inspection, available in single- and dual-load-port configurations (OST-3000, 3100, 3200) for 200mm and 300mm wafers. It uses Nikon's CFI60-2 objectives for high-contrast, low-flare imaging across 25x-1,500x magnification, with a darkfield mode offering roughly 3x better ***-to-background noise than earlier-generation systems for surface and macro defect detection.

Specifications

Category

Other Industrial Products

Location

Belmont, California, and Nikon Precision Europe GmbH, headquartered in Langen, Germany

Listed

3 weeks ago

Views

11