Description

8-Inch Optical Profiler System Equipment Type: Optical Profiler / Surface Profilometry System Wafer Size: Up to 8 Inch Specifications Measurement Technology: Phase-Shifting Interferometry (PSI) Measurement Mode: Vertical Scanning Interferometry (VSI) Vertical Resolution: As Low as 0.1 nm Auto XY Stage: 0.5 µm Encoder Auto TT: 0.1 µm Resolution XY Table XY Tilt: Supported Z Axis: Motorized Focus: Fast Z-Axis Focus Computer: PC Operating System: Windows XP Software: Wyko Vision 32 Key Features Phase-Shifting Interferometry (PSI) Vertical Scanning Interferometry (VSI) High-Resolution Non-Contact Surface Measurement Vertical Resolution Down to 0.1 nm Automated XY Positioning Motorized Z-Axis Focus Fast Z Focus XY Tilt Adjustment Description This 8-inch optical profiler system is designed for high-precision, non-contact surface measurement and characterization. The system supports both Phase-Shifting Interferometry (PSI) and Vertical Scanning Interferometry (VSI), enabling detailed measurement of surface topography, roughness, step height, and other three-dimensional surface characteristics. With vertical resolution as low as 0.1 nm, automated XY positioning, XY tilt adjustment, and motorized fast Z-axis focusing, the system is suitable for semiconductor wafers, thin films, MEMS, precision components, optical surfaces, and research applications. The system includes a PC running Windows XP with Wyko Vision 32 software for measurement, analysis, and data processing.