Description

Axcelis PURION H200, high-current ion implanters Not yet installed Currently Configured for: 150mm Tool is new, not installed. Is System On-Line?Yes Can Produce Wafers As-Is ?No CE Mark Certified ?Yes Are any Manuals included ?Std OEM Audit Available?Yes 3rd Party Audit Available ?Yes Decontamination Report Exists?No Overall Tool Condition Any Field Modifications ?No All Cables present ?Yes Any Corrosion visible on modules ?No Any Missing / Damaged Parts ?No Shipping Brackets Included ?Yes Wafer HandlerYes Handler Type # of Cassette / FOUP LoadersFOUP Loaders End-Effecter Type150mm SinglePre-Aligner ?Yes Mini-EnvironmentYes Handler Options ?150mm Hot chuck System Software System SW (OS) versionWindows 10 System SW (App) version3.8.3.0.2 Log-In User NameSysadmin Log-In Passwordsysadmin SEMI Std Options (E84, E99, etc..)E84 HSMSYes Supporting Equipment Ext TransformerNo UPSNo Heat Exchanger / ChillerChiller Facility Requirements CDAYes DIWYes GasGN2,PN2,Ar Power 480V 3phase 5Wire