Description

150mm Semiconductor Fabrication System Year: 1996 Condition: Refurbished Stock Number: BM7301 Wafer Size: 150 mm (6 inch) Equipment Details Equipment Type: Semiconductor Fabrication / Surface Treatment System Category: Surface Treatment / Cleaning Subcategory: Semiconductor Fabrication Description This refurbished semiconductor fabrication system is designed for processing 150 mm (6-inch) wafers. The equipment is suitable for semiconductor manufacturing, wafer processing, surface treatment, cleaning, research and development, and related fabrication applications. The system has been refurbished and is available for semiconductor production or laboratory use. Refurbished in 2024 and have not been put into production operation since the refurbishment. The equipment is in excellent condition. TCP 9600SE ***mm gas: Cl2, BCl3, SF6,N2, O2, Ar, CF4, H2O, He, CDA + Edwards TCU 40/80