Description

TEL Tokyo Electron *** Bottom 200mm ESC Chuck 8 NW-2 is a wafer chuck/electrostatic-chuck related component. Use: It supports and positions the wafer during processing and, when applicable, contributes to electrostatic clamping and thermal/process interface control. Machine / Process / Subsystem: Tokyo Electron semiconductor equipment covers coater/developer, etch, cleaning, deposition and test processes; CLEAN TRACK/LITHIUS hardware supports lithography track processing. Key Features & Specifications: • Manufacturer: Tokyo Electron - TEL • Model / Part No.: *** • wafer support and positioning • process-chamber hardware with tight mechanical/thermal requirements • Wafer / nominal size: 200mm (from product identification)

Specifications

Manufacturer

Tokyo Electron - TEL

Model

1810-120900-13

Category

Parts & Accessories

Condition

Used Working

Location

Albuquerque, NM, USA

Listed

1 month ago

Views

10