Description

TEL Tokyo Electron 848 TCP Transition Chill Plate Left ACT12-200 Dented Spare is a thermal-management component. Use: It removes heat or stabilizes component/wafer temperature within the equipment. Machine / Process / Subsystem: Tokyo Electron semiconductor equipment covers coater/developer, etch, cleaning, deposition and test processes; CLEAN TRACK/LITHIUS hardware supports lithography track processing. Key Features & Specifications: • Manufacturer: Tokyo Electron - TEL • Model / Part No.: 848 TCP / ACT12-200 • temperature-control function • supports repeatable process or subsystem thermal conditions

Specifications

Manufacturer

Tokyo Electron - TEL

Model

848 TCP / ACT12-200

Category

Parts & Accessories

Condition

Used

Location

Albuquerque, NM, USA

Listed

1 month ago

Views

15