Description

TEL Tokyo Electron IRAM Interface Block Lithius Clean Track is an electronic control/interface board or module. Use: It performs control, *** processing, communications, motion interfacing or I/O inside the host tool. Machine / Process / Subsystem: Tokyo Electron semiconductor equipment covers coater/developer, etch, cleaning, deposition and test processes; CLEAN TRACK/LITHIUS hardware supports lithography track processing. Key Features & Specifications: • Manufacturer: Tokyo Electron - TEL • Model / Part No.: Lithius • machine-control electronics • interfaces sensors, actuators, buses or subsystem signals

Specifications

Manufacturer

Tokyo Electron - TEL

Model

Lithius

Category

Parts & Accessories

Condition

Used / Incomplete

Location

United States

Listed

1 month ago

Views

12