Description

A gate/slit valve is a vacuum isolation valve mounted between two chambers on a semiconductor wafer processing tool, for example between a load lock and a process chamber, allowing a wafer to pass through an open slit while maintaining a vacuum-tight seal when closed. VAT is a leading manufacturer of these valves, which use a pneumatically actuated gate and an elastomer or metal seal against a knife-edge seat to achieve reliable, high-cycle isolation. This particular unit is configured for use on Applied Materials wafer transfer/process modules.

Specifications

Manufacturer

Applied Materials

Model

0340X

Category

Pumps & Fluid Handling

Condition

New

Location

Gilbert, IA, USA

Listed

1 month ago

Views

15