Description

AMAT SEMVision cX Inspection System Manufacturer: Applied Materials (AMAT) Model: SEMVision cX Year: 2001 Condition: Used Wafer Size: 200 mm Equipment Details Equipment Type: SEM-Based Wafer Inspection / Defect Review System Category: Semiconductor Metrology / Inspection Subcategory: Semiconductor Fabrication Specifications Resolution: 4 nm @ 1 kV Acceleration Voltage: 0.5–15 kV Probe Current: 30 pA / 100 pA Magnification: 200×–20,000× Wafer Size: 200 mm Tilt Angles: 15°, 30°, 45° Rotation Angles: 0°, 45°, 90°, 180° Main Unit Power: 3-Phase, 208 VAC EDX Rack Power: Single-Phase, 110 VAC Included Accessories Baking Box: 1 Unit User Manual: 1 Unit EDX Analyzer EDX Compressor Transformer UPS System Alarm Panel Distribution Board Condition & Operational History The system was operational until 2012 and was shut down as part of a planned shutdown due to reduced usage. No critical defects were reported at the time of shutdown. Known Issues / Missing Items Ion Pump Controller Display: Display panel is defective. The controller reportedly functions, but vacuum levels cannot be monitored from the display. UPS: Battery has been removed and the system is set to bypass mode. Water Leakage / Fire Alarm Panel: Battery has been removed and the panel is set to bypass mode. Dry Pump: Not included. Description The Applied Materials SEMVision cX is a 200 mm SEM-based semiconductor inspection and defect review system designed for high-resolution analysis of wafer defects and process-related features. The system provides resolution down to 4 nm at 1 kV, an acceleration voltage range of 0.5–15 kV, and magnification from 200× to 20,000×. Multiple wafer tilt and rotation positions support detailed inspection and analysis. This unit was reportedly operational until its planned shutdown in 2012. The system has several known issues and does not include the dry pump; therefore, inspection, refurbishment, and recommissioning should be considered before returning the tool to production use.