Description

Key Features Versatility Accommodates 50mm to 200mm/300mm wafers without changing sample holders or jigs. Performs stress and wafer bow measurements at both room and high temperatures. Simple Sample Handling Convenient wafer placement on the heat chuck stage with location pins ensures consistent, reproducible operation. Auto Switching Dual Laser Patented dual-laser technology automatically switches wavelengths (650nm and 780nm) based on sample reflectivity, enabling measurements on diverse films, including nitrides, polyimides, low-k, high-k materials, and metals. Programmable Temperature Cycling Create recipes for single or multiple heat cycles with programmable ramp rates and annealing temperatures to evaluate thermal stability. Data Management & Reporting Exportable graphs and results—such as Stress vs. Temperature, Stress vs. Time, or Wafer Bow vs. Temperature—facilitate report generation in Excel™ or Word. Standard features include Coefficient of Thermal Expansion calculations. Specifications Operating Temperature: Ambient to 500°C Heating Method: Resistive heat chuck with air cooling Measurement Technique: Non-contact laser scanning Wafer Size: 50mm to 200mm/300mm (round or square) Scanning Method: High-precision single-line scan Temperature Ramp Rate: 1–20°C/min, programmable (ramp and hold cycles available) Film Stress Range: 1 MPa to 1.4 GPa for Si wafers with at least 1µm curvature or bow height change Repeatability: 1% (1 sigma) on a 20m curvature mirror (ambient) Accuracy: Better than 2.5% based on a 20m curvature mirror Auto Laser Switching: 650nm and 780nm Laser Class: Class 1 Data Export: Compatible with Excel™ and JPEG formats Purging Gas: Nitrogen, Argon, or Forming Gas Computer Requirements: Pentium-based PC with SVGA monitor Footprint & Weight: Main Unit: 26” (H) X 36” (W) X 55” (D) (7” for rear exhaust fan is included) Cart: 28” (H) X 22” (W) X 30” (D), 500

Specifications

Manufacturer

FSM

Category

Metrology & Inspection

Condition

NEW

Location

Mipitas, CA, USA

Listed

1 month ago

Views

24