Description
Horiba Stec Sec 4600M Mass Flow Controller MFC 100 Slm H2 New is a mass flow controller (MFC). Use: It meters and actively regulates process-gas flow to a commanded setpoint. Machine / Process / Subsystem: HORIBA STEC mass-flow technology uses thermal sensing and control valves for precise process-gas delivery in semiconductor and other manufacturing systems. Key Features & Specifications: • Manufacturer: Horiba STEC • Model / Part No.: 4600M • thermal/flow sensing with closed-loop valve control • process-gas delivery for deposition, etch, implant, clean or other controlled-gas processes • Flow rating: 100 Slm (from product identification)
Specifications
- Manufacturer
- Horiba STEC
- Model
- 4600M
- Category
- Chemical & Gas Systems
- Condition
- New
- Location
- Albuquerque, NM, USA
- Listed
- 1 month ago
- Views
- 17
Horiba Stec Sec 4600M Mass Flow Controller MFC 100 Slm H2 New
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csx741684
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