Description

Step Height Measurement System Year: 1995 Condition: Used Operational Status: Operational Wafer Size: 8 inch Specifications Measurement Range: 13 µm, 300 µm Scan Length: 210 mm Scan Speed: 1 µm/sec – 25 mm/sec Stylus Force: 1–100 mg Motorized X-Y Stage: Maximum Sample Size 254 × 254 mm Stylus: Standard Head with L-Type (Yellow) Stylus Utility Requirement: Vacuum Power Supply: 115 V, 50 Hz, 4 A Computer Configuration Processor: Intel Pentium 233 MHz RAM: 32 MB Hard Drive: 2 GB Equipment Details Equipment Type: Step Height Measurement System Category: Semiconductor Metrology / Inspection Subcategory: Metrology / Step Height Measurement Description This step height measurement system is designed for precision surface profiling and dimensional measurement applications. The system supports wafers up to 8 inches and features a motorized X-Y stage with a maximum sample size of 254 × 254 mm. It provides a scan length of up to 210 mm, adjustable stylus force, and a wide range of scanning speeds. The system is equipped with a standard measurement head and L-type yellow stylus. It has been installed and operated in a cleanroom environment. The equipment is currently operational and suitable for semiconductor metrology, surface profiling, step height measurement, thin-film research, and general precision measurement applications.