Description

KLA Tencor P10 refurblished wafer size: 150mm – Sample size: up to 200mm – Low force head: 0.05 – 15mg – 0.05mg resolution – Step heigh repeatability, 0.001µm max. In the 13µm range; 0.005µm max in the 130µm range – Scan length: 150mm – Scan speed: 1µm / sec to 25mm / sec

Specifications

Manufacturer

KLA

Category

Metrology & Inspection

Condition

USED

Location

Hong Kong

Listed

1 month ago

Views

13