Description

The KLA Tencor P10 is a manual-load stylus profiler primarily used for measuring surface characteristics like step height, roughness, and waviness in research and development or production environments. Key Specifications Vertical Range 50 Å to 130 µm (standard) Vertical Resolution Sub-angstrom resolution (as low as 0.5 Å) Scan Length Up to 60 mm (full scan) Stylus Force Range Programmable from 1 mg to 50 mg (With optional Microhead 0.05 mg to 50 mg) Max Substrate Size Up to 8 inches (200 mm) diameter Stage Motorized X-Y stage with manual Z control Analysis Parameters Step height, roughness, waviness, slope, area, etc. Operating System Windows 3.1 Features - Closed-loop sensor design: Ensures constant force application during scanning, allowing for measurement on a variety of surfaces, including some softer materials like photoresist. - Data Analysis: Features include fitting and leveling scan data, automated edge or apex detection for features, and 3D rendering of scan data. - Optics: Equipped with top-view and side-view optics for sample alignment and imaging. - Includes VLSI 938nm (9380A) Step height standard and Stylus Alignment Tool - Includes User and Maintenance manuals KLA-Tencor P10 can profile a variety of materials including: - Semiconductor wafers - Thin-film heads - Precision-machined and polished surfaces - Ceramics for micro-electronics - Glass for flat panel displays - Optical surfaces