Description

KLA-Tencor Surfscan 6220 Defect Inspection System is an inspection/metrology component or subsystem. Use: It supports imaging, defect detection, review or dimensional/process-control measurements. Machine / Process / Subsystem: KLA process-control systems use precision optics, stages, sensors and electronics for wafer inspection, metrology and defect/process monitoring. Key Features & Specifications: • Manufacturer: KLA-Tencor • Model / Part No.: Surfscan 6220 • inspection/process-control function • used to detect, image or characterize wafer/device features

Specifications

Manufacturer

KLA-Tencor

Model

Surfscan 6220

Category

Metrology & Inspection

Condition

Refurbished

Location

United States

Listed

1 month ago

Views

12