Description

KLA-Tencor Surfscan SP2.5+ is an OEM equipment component or subsystem. Use: It performs the function indicated by its assembly/part designation within the host equipment. Machine / Process / Subsystem: KLA process-control systems use precision optics, stages, sensors and electronics for wafer inspection, metrology and defect/process monitoring. Key Features & Specifications: • Manufacturer: KLA-Tencor • Model / Part No.: Surfscan SP2 • OEM mechanical/electrical integration • exact performance limits depend on the host-tool configuration and the manufacturer's part specification

Specifications

Manufacturer

KLA-Tencor

Model

Surfscan SP2

Category

Metrology & Inspection

Location

United States

Listed

1 month ago

Views

14