Description

Axcelis *** Aperture Quad Exit is a process-chamber or beamline hardware component. Use: It shields, confines, shapes or protects a critical region of the process chamber or ion/particle beam path. Machine / Process / Subsystem: Axcelis ion implantation systems use beamline, source, wafer handling and control subsystems to deliver precise dopant implantation for semiconductor fabrication. Key Features & Specifications: • Manufacturer: Axcelis • Model / Part No.: *** • geometry-critical process hardware • helps control exposure, contamination, plasma/beam shape or component protection

Specifications

Manufacturer

Axcelis

Model

0295-0099-0003

Category

Semiconductor & Electronics

Condition

Used

Location

United States

Listed

1 month ago

Views

14