Description

Axcelis 17A8406 GSD Chuck Finger 150mm is a wafer chuck/electrostatic-chuck related component. Use: It supports and positions the wafer during processing and, when applicable, contributes to electrostatic clamping and thermal/process interface control. Machine / Process / Subsystem: Axcelis ion implantation systems use beamline, source, wafer handling and control subsystems to deliver precise dopant implantation for semiconductor fabrication. Key Features & Specifications: • Manufacturer: Axcelis • Model / Part No.: 17A8406 • wafer support and positioning • process-chamber hardware with tight mechanical/thermal requirements • Wafer / nominal size: 150mm (from product identification)

Specifications

Manufacturer

Axcelis

Model

17A8406

Category

Semiconductor & Electronics

Condition

Used

Location

United States

Listed

1 month ago

Views

14