Description
Wafer size : 12 inch Resolution : ≦2nm Static measurement repeatability(3σ) : 0.6nm Dynamic measurement repeatability(3σ) : 1.7nm Throughput : 33(20point) Stage stop position accuracy : ±1um Accelerating voltage : 300 ~ 1600V Measurement range : 0.050 ~ 2.0um Image process : VIPS200 Missing/Defect parts ・IP power supply 1ea ・Stage laser excel board 1ea ・Turbo pump 2ea
Specifications
- Category
- Semiconductor & Electronics
- Condition
- USED
- Location
- Asia
- Listed
- 1 month ago
- Views
- 18
HITACHI S-9380 CD-SEM
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Asia
O
oll309688
Identity revealed after deal is confirmed
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