Description

LAM *** Cap Electrode Thin Edge is a process-chamber or beamline hardware component. Use: It shields, confines, shapes or protects a critical region of the process chamber or ion/particle beam path. Machine / Process / Subsystem: Lam Research wafer-fabrication platforms are used in plasma etch, deposition and related process modules where precise process control and repeatability are critical. Key Features & Specifications: • Manufacturer: Lam Research • Model / Part No.: 715 • geometry-critical process hardware • helps control exposure, contamination, plasma/beam shape or component protection

Specifications

Manufacturer

Lam Research

Model

715

Category

Semiconductor & Electronics

Condition

Used

Location

United States

Listed

1 month ago

Views

15