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Description

LAM *** Filter Ring 4500 Lower Chamber Ceramic is a process-chamber or beamline hardware component. Use: It shields, confines, shapes or protects a critical region of the process chamber or ion/particle beam path. Machine / Process / Subsystem: Lam Research wafer-fabrication platforms are used in plasma etch, deposition and related process modules where precise process control and repeatability are critical. Key Features & Specifications: • Manufacturer: Lam Research • Model / Part No.: 716 • geometry-critical process hardware • helps control exposure, contamination, plasma/beam shape or component protection

Specifications

Manufacturer
Lam Research
Model
716
Category
Semiconductor & Electronics
Condition
Used
Location
United States
Listed
1 month ago
Views
13

LAM 716 020905 001 Filter Ring 4500 Lower Chamber Ceramic

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United States
A

and605763

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