Description

Hitachi S-4500 Scanning Electron Microscope (SEM) Manufacturer: Hitachi Model: S-4500 Equipment Type: Scanning Electron Microscope (SEM) Category: Semiconductor Metrology / Inspection System Configuration Diffusion Pump Diffusion Pump: DIAVAC DPF-4Z Pressure Control Mist Separator: SMC AM200 Vacuum Gauge: ULVAC WP-02 Penning / Gessler Gauge: Tokyo Electronics 001155 Control System NI PXI-1033 SEIWA LL-304 Computer: Dell PC Power Requirements Power Supply: 3-Phase, 100 V, 50 A Description The Hitachi S-4500 is a high-performance scanning electron microscope designed for precision imaging, metrology, and inspection applications. The system provides detailed surface imaging and analysis capabilities suitable for semiconductor devices, wafers, electronic components, materials research, failure analysis, and quality control. Its vacuum system incorporates a DIAVAC DPF-4Z diffusion pump together with dedicated pressure-control and vacuum-monitoring components. The control configuration includes NI PXI-1033 and SEIWA LL-304 hardware with a Dell PC. The Hitachi S-4500 is suitable for semiconductor manufacturing, research and development, materials characterization, process development, and laboratory inspection applications.